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Evaluation of Variability in High-k/Metal-Gate MOSFET using Takeuchi Plot
Evaluation of Variability in High-k/Metal-Gate MOSFET using Takeuchi Plot
2011
Mizutani Tomoko
Kumar Anil
Nishida Akio
Takeuchi Kiyoshi
Inaba Satoshi
Kamohara Shiro
Terada Kazuo
Mogami Tohru
Hiramoto Toshiro
Keywords:
High-κ dielectric
MOSFET
Electronic engineering
Materials science
Optoelectronics
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