Preparation of Fluorine-doped Composite Abrasives and Influence of Polishing Performance on Single Crystal Silicon

Fluorine-doped composite abrasives have a wide range of applications in industry.The physical properties of composite abrasives with different fluorine doping mode or F sources were compared through X-ray diffraction(XRD),scanning electron microscopy(SEM),laser particle analyzer and atom force microscopy(AFM).Their polishing performances on single crystal silicon were also investigated.The results showed that the composite abrasives prepared under the experiment conditions of 7% doping fluorine,precipitation at 80℃ and calcination at 1000℃ had a low tap density,spherical morphology,high CeLa2O3F3 content and better surface polishing performance.The composite abrasives prepared by rare earth carbonate directly sprayed with hydrofluoric acid and calcined under the same conditions had a high polishing rate but a poor surface polishing performance.