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An Optimized Via Contact Scheme of FeRAM for Double-Level Metallization and Beyond
An Optimized Via Contact Scheme of FeRAM for Double-Level Metallization and Beyond
1997
Yoo-Sang Hwang
Jinwoo Lee
Sung-Yung Lee
Bon-jae Koo
Dong-Jin Jung
Yoon-Soo Chun
Mi-Hyang Lee
Dong-won Shin
Soo-Ho Shin
Sang-eun Lee
Byung-Hee Kim
N. J. Kang
Kinam Kim
Keywords:
Electronic engineering
Ferroelectric RAM
Materials science
Optoelectronics
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