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Microlens Fabrication Method by the Modified LICA Process
Microlens Fabrication Method by the Modified LICA Process
2002
Sung-Keun Lee
Kwang Cheol Lee
Seung-S. Lee
Keywords:
Composite material
LIGA
Materials science
Fabrication
Microlens
Microelectromechanical systems
Nanotechnology
Correction
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