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Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching
Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching
2017
Yuan Li
Hongwei Yan
Ke Yang
Caizhen Yao
Zhiqiang Wang
Chunyan Yan
Xinshu Zou
Xiaodong Yuan
Liming Yang
Xin Ju
Keywords:
Ultrasonic sensor
Etching
Laser
Physics
Hydrofluoric acid
Optics
Analytical chemistry
ultrasonic assisted
laser damage
Optoelectronics
Correction
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