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Fabrication and property evaluation of Al-1 wt.%Si0.5 wt.%Cu sputtering target materials by spark plasma sintering Process
Fabrication and property evaluation of Al-1 wt.%Si0.5 wt.%Cu sputtering target materials by spark plasma sintering Process
2016
오익현
Junho Jang
양준모
손인진
임재원
박현국
Keywords:
Sputtering
Fabrication
Materials science
process
Metallurgy
Spark plasma sintering
Correction
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