КАЛИБРОВКА УСТАНОВОК ИЗМЕРЕНИЙ РАЗМЕРОВ ЭЛЕМЕНТОВ МИКРОЭЛЕКТРОННЫХ СТРУКТУР

Development of microelectronics requires solution of the problem ensuring unity of linear measurements in a submicron range. The problem can be solved on the condition that calibration of measuring devices shall be made in accordance with reference samples that is a short length scale. While making calibration of measuring equipment with the help of a reference measure it is important to investigate components of the method accuracy and their influence on measuring results. The paper considers methodical errors which are specific for methods of optical and atomic force microscopy. Calibration results of an optical measuring microscope are given in the paper. The paper reveals that an additive error depends on parameters of a material and the form of measured elements for an optical measuring microscope. The methodical error of atomic force microscopes is predicated on the probe point shape. The paper considers a short length scale used for calibration of optical and atomic force microscopes. Recommendations for users of the measuring equipment are formulated in the paper.