High coercivity ferrite thin-film tape media for perpendicular recording

Abstract Reactive sputtering using an electron–cyclotron-resonance microwave plasma was introduced to prepare ferrite thin-film media at substrate temperatures lower than 150°C without oxidation process after their deposition. The ferrite thin-films deposited on glass substrates had perpendicular magnetic anisotropy, high coercivity of about 3000 Oe and very smooth surface. The ferrite thin-films deposited on organic flexible film substrates such as polyimide and PET films also showed perpendicular magnetic anisotropy and high coercivity of 1700–2000 Oe.