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Fabrication and Modeling of Microlens Array by a Modified LIGA Process
Fabrication and Modeling of Microlens Array by a Modified LIGA Process
2003
Dong Sung Kim
Hyun Sup Lee
Sang Sik Yang
Bong-Kee Lee
Sung-Keun Lee
Tai Hun Kwon
Seung S. Lee
Keywords:
LIGA
Microlens
Electronic engineering
Fabrication
Electrical engineering
Engineering
Optoelectronics
Correction
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