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Cu grain growth in damascene narrow trenches
Cu grain growth in damascene narrow trenches
2008
Sylvain Maitrejean
V. Carreau
Olivier Thomas
S. Labat
Belkhiri Kaouache
M. Verdier
Joel Lepinoux
Yves Bréchet
Marc Legros
Joël Douin
Cyril Cayron
Olivier Sicardy
D. Weygand
Olivier Dubreuil
P. Normandon
Keywords:
Grain growth
Copper interconnect
Metallurgy
Materials science
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