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ZnO nanoscale devices based on reductive oblique-angle sputtering
ZnO nanoscale devices based on reductive oblique-angle sputtering
2011
Jun-Han Huang
R. S. Huang
Yi-Feng Lai
Po-Chien Huang
Chun-Chu Liu
Kuang Yao Lo
Chuan-Pu Liu
Keywords:
Nanotechnology
Nanoscopic scale
Sputtering
Engineering
oblique angle
Correction
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