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Relationship between the carrier concentration and the O1s spectra in ZnO films deposited by the RF sputtering method
Relationship between the carrier concentration and the O1s spectra in ZnO films deposited by the RF sputtering method
2016
Jiesheng Zhang
Shingo Sato
Yasuhisa Omura
Tadashi Saitoh
Keywords:
Sputtering
Spectral line
Materials science
Analytical chemistry
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