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Comparaitve Economic Analysis Of Mcm-d Fabrication Costs
Comparaitve Economic Analysis Of Mcm-d Fabrication Costs
1993
P. Garrout
R. Heistand
D. Frye
J. Carr
D. Burdcaux
Keywords:
Sputtering
Electronic engineering
Ceramic
High-κ dielectric
Engineering
Semiconductor device modeling
Dielectric
Transistor
Gate dielectric
Chemical process
Optoelectronics
Materials science
Fabrication
Correction
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