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Elastic and inelastic sputtering of LiF, KCl, SiC crystals during multicharged argon ion bombardment
Elastic and inelastic sputtering of LiF, KCl, SiC crystals during multicharged argon ion bombardment
1996
B. G. Atabaev
Sh.S. Radzhabov
Kuchkarov
Keywords:
Ionization
ion bombardment
Halide
Argon
Carbide
Compounds of carbon
Electric charge
Atomic physics
Sputtering
Materials science
Correction
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