Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors

In an effort to fabricate In–Ga–Zn oxide (IGZO) thin-film transistors (TFTs) that combine high performance and high stability, we optimize sputtering conditions to create devices based on different...