Deposition of diamond-like carbon films via excimer laser ablation of polybutadiene

Abstract The process of depositing diamond-like carbon films on fused quartz substrates via the plume generated by the excimer laser ablation of polybutadiene is reported in this paper. The deposited films were characterized and investigated using Raman spectroscopy, scanning electron microscopy, and ultraviolet-visible spectroscopy. Microhardness and thickness of the deposited films were measured, and influence of experimental factors such as substrate temperature and atmosphere in chamber on properties were also discerned. Results of Raman spectroscopy and scanning electron microscopy on films deposited at 700 °C in hydrogen confirms that the observed columnar grains, micro-fibers and ball-like grains with micron size consist of predominantly sp 3 bonded diamond-like carbons. A band-gap absorption occurring near 260 nm (4.8 eV) has been observed from the central region of the sample, and the high microhardness (2633 HV) has been determined from the edge of the same sample.