NanoXCT: development of a laboratory nano-CT system

The NanoXCT project aims at developing a laboratory nano-CT system for non-destructive testing applications in the micro- and nano-technology sector. The system concept omits the use of X-ray optics, to be able to provide up to 1 mm FOV (at 285 nm voxel size) and down to 50 nm voxel size (at 0.175 mm FOV) while preserving the flexibility of stateof- the-art micro-CT systems. Within the project a suitable X-ray source, detector and manipulation system are being developed. To cover the demand for elemental analysis, the project will additionally include X-ray spectroscopic techniques. These will be reported elsewhere while this paper is focused on the imaging part of the project. We introduce the system concept including design goals and constraints, and the individual components. We present the current state of the prototype development including first results.