Energy efficiently dead zone avoiding temperature control system for semiconductor manufacturing equipment using reversal of polarity of thermoelectric element

PURPOSE: A temperature control system of a semiconductor manufacturing facility is provided to reduce power consumption in controlling a dead zone by separately controlling a thermoelectric module block. CONSTITUTION: A thermoelectric module block part is composed of a thermoelectric device and a heat exchange unit. An SMPS unit generates a voltage and a current according to a received control output quantity. A switch unit(223) selects whether to apply power according to external control. A main control unit(200) outputs the control output quantity and a polarity signal. A dead zone operating unit(210) provides the polarity signal and the control quantity out of the dead zone. [Reference numerals] (200) Main control unit; (205) Control power management unit; (210) Dead zone operating unit; (211) Control range determination unit; (212) Output reconfiguration unit; (213) Control signal generating unit; (220) Polarity switching unit; (AA) Power supply; (BB) Refrigerant