Development of the Precision Positioning Mechanism by Nano Displacement Magnification Device

A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about displacement to the 10V input voltage(). And the about 50nm of linearity error in the measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.