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Control of ZnO Sputtering Growth by Changing Substrate Bias Voltage
Control of ZnO Sputtering Growth by Changing Substrate Bias Voltage
2017
Jun Meng
Jae-Won Choi
전원진
Jungyol Jo
Keywords:
Optoelectronics
Zinc
Thin-film transistor
substrate bias voltage
Sputtering
Materials science
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