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Dependence of Silicon Film Thickness on SOI-Lateral Junctionless MOSFET’s Parameters
Dependence of Silicon Film Thickness on SOI-Lateral Junctionless MOSFET’s Parameters
2019
Alexey S. Klyuchnikov
Jsc «Niime», Moscow, Russia
Anton Y. Krasyukov
Evgenia A. Artamonova
Mikhail A. Korolev
Darya I. Efimova
Keywords:
Silicon on insulator
MOSFET
Optoelectronics
Silicon
Materials science
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