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Memory Effect on Extraction of an Aluminum-Nitride Ion Beam from a Magnetron Sputter type Ion Source
Memory Effect on Extraction of an Aluminum-Nitride Ion Beam from a Magnetron Sputter type Ion Source
2017
Kentaro Yoshioka
Takahiro Kenmotsu
M. Wada
Keywords:
Focused ion beam
Ion beam
Beam (structure)
Cavity magnetron
Ion beam deposition
Sputtering
Ion source
Analytical chemistry
Nitride
Materials science
Optoelectronics
Correction
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