Harvester of Energy on Pb(Zr, Ti)O3 Thin Films

The design was developed and investigated, and a laboratory sample of energy harvester based on 1–1.5 μm thick lead zirconate titanate Pb(Zr, Ti)O3 (PZT) films was assembled. PZT films were formed on oxidized silicon by high-frequency reactive plasma sputtering in the oxygen atmosphere. The laboratory sample of the energy harvester was sensitive to mechanical acceleration and vibration. Testing of sensors on a special electrodynamic stand showed that the sensor has a high sensitivity in the frequency range from 2–5 Hz with a sensitivity of up to 75 pС/g, which corresponds to a sensitivity of 1.2–1.5 V/g. The same design of the energy harvester was sensitive to scattered electromagnetic energy with a sensitivity of 6.8 10−4 V/(V/cm). The maximum response to the electromagnetic field was observed at a frequency of 100−200 Hz.