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Investigation of the Minority Carrier Lifetime Reduction during Industrial DC-Sputtering of Metal Seed Layers
Investigation of the Minority Carrier Lifetime Reduction during Industrial DC-Sputtering of Metal Seed Layers
2010
Roland Trassl
R. Preu
Philip Hartmann
M. Gräf
Dirk Reinwand
Keywords:
Atomic physics
Sputtering
Carrier lifetime
Materials science
Metal
Optoelectronics
Correction
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