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Influence of Argon Gas Concentration in N2-Ar Plasma for the Nitridation of Si in Abnormal Glow Discharge
Influence of Argon Gas Concentration in N2-Ar Plasma for the Nitridation of Si in Abnormal Glow Discharge
2016
K. Abbas
Riaz Ahmad
I. A. Khan
S. Saleem
U. Ikhlaq
Keywords:
Glow discharge
Plasma
Argon
Analytical chemistry
Chemistry
Sputtering
Crystallinity
argon gas
Nitriding
Correction
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