Structure and optical properties of CrOxNy films with composition modulation

Yanyan Yuan,Bingye Zhang,Jian Sun,Philippe Jonnard,Karine Le Guen,Yuchun Tu,Chao Yan,Rui Lan

Structure and optical properties of CrOxNy films with composition modulation

2019

Yanyan Yuan
Bingye Zhang
Jian Sun
Philippe Jonnard
Karine Le Guen
Yuchun Tu
Chao Yan
Rui Lan

ABSTRACTThe composition and structure properties of the CrOxNy films deposited by RF reactive magnetron sputtering were investigated and correlated with their optical properties. Two kinds of targe...

Keywords:

Modulation
X-ray photoelectron spectroscopy
Sputter deposition
Composite material
Materials science
Sputtering
reactive magnetron

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