Preparation and Superconducting Properties of MoNx Thin Films

Formation process, phase analysis and superconducting properties of MoNx thin films prepared by DC and RF reactive magnetron sputtering were Investigated. The optical emission spectra of N2 plasma were measured by a spectroscope. In N2 plasma of DC and RF magnetron sputtering, excited N2 molecules, N2 ions and excited Mo atoms were observed. The Tc of cubic MoNx films prepared by DC and RF modes was found to range between 8.5 K and below 4.2 K. B1 like MoN films were nonsuperconducting above 4.2 K in contrast to theoretical predictions.