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AlN deposition on Sapphire substrate by sputtering
AlN deposition on Sapphire substrate by sputtering
2017
Yuta Yamaki
Sho Iwayama
Hideto Miyake
Kazumasa Hiramatsu
Eiji Komatsu
Nobuyuki Terayama
Keywords:
Sputtering
Substrate (chemistry)
Sapphire
Inorganic chemistry
Materials science
sapphire substrate
Deposition (law)
Optoelectronics
Correction
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