Old Web
English
Sign In
Acemap
>
Paper
>
A spacer-on-spacer scheme for self-aligned multiple patterning and integration
A spacer-on-spacer scheme for self-aligned multiple patterning and integration
2016
Angelique Raley
Sophie Thibaut
Nihar Mohanty
Kal Subhadeep
Satoru Nakamura
Akiteru Ko
David L. O'Meara
Kandabara Tapily
Steve Consiglio
Peter Biolsi
Keywords:
Optoelectronics
Physics
Multiple patterning
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI
[]