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Silicon oxide surface reaction modeling coupled with global bulk plasma model in inductive coupled fluorocarbon plasmas
Silicon oxide surface reaction modeling coupled with global bulk plasma model in inductive coupled fluorocarbon plasmas
2013
Se-Ah Lee
Poo-Reum Chun
Yeong-Geun Yook
Kwang-Sung Choi
Deog-Gyun Cho
Dong-Hun Yu
Won Seok Chang
Deuk-Chul Kwon
Yeon Ho Im
Keywords:
Materials science
Fluorocarbon
Plasma
Chemical engineering
Silicon oxide
surface reaction
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