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Three focused ion beam nanofabrication of plasmonic devices
Three focused ion beam nanofabrication of plasmonic devices
2019
Till Leissner
Shailesh Kumar
Martin Thomaschewski
Jost Adam
Serguei Chiriaev
Jacek Fiutowski
Sergey I. Bozhevolnyi
Horst-Günter Rubahn
Keywords:
Focused ion beam
Plasmon
Nanotechnology
Nanolithography
Materials science
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