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Residual flatness and scale calibration for a point autofocus surface topography measuring instrument
Residual flatness and scale calibration for a point autofocus surface topography measuring instrument
2019
Giacomo Maculotti
Xiaobing Feng
Rong Su
Maurizio Galetto
Richard K. Leach
Keywords:
Optics
Measuring instrument
Calibration
Physics
Residual
Flatness (systems theory)
Autofocus
Linearity
Correction
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