Old Web
English
Sign In
Acemap
>
Paper
>
硫化ニオブスパッタ膜の格子定数 c 軸長に及ぼすアルゴン分圧およびバイアス電圧の影響
硫化ニオブスパッタ膜の格子定数 c 軸長に及ぼすアルゴン分圧およびバイアス電圧の影響
2013
gan sasaki
kazunari matu
singo nakano
man akira ikeda
kenzi matuda
Keywords:
Thin film
Biasing
Sputtering
Crystal structure
Tribology
Inorganic chemistry
Materials science
Composite material
X-ray
internal stress
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]