Versatile device for in-situ discharge cleaning and multiple coatings of long, small diameter tubes

2010 
Electron clouds, which can limit machine performance, have been observed in many accelerators including RHIC at BNL. Additional concern for the RHIC machine, whose vacuum chamber is made from relatively high resistivity 316LN stainless steel, is high wall resistivity that can result in unacceptably high ohmic heating for superconducting magnets. The high resistivity can be addressed with a copper (Cu) coating; a reduction in the secondary electron yield can be achieved with a TiN or amorphous carbon (a-C) coating. Applying such coatings in an already constructed machine is rather challenging. We have been developing a robotic plasma deposition technique for in-situ coating of long, small diameter tubes. The technique entails fabricating a device comprising of staged magnetrons mounted on a mobile mole for deposition of about 5 ?m of Cu followed by about 0.1 ?m of a-C. As a first step, a 15-cm Cu cathode magnetron was designed, fabricated, and 30-cm long samples of the RHIC pipe have been coated with 2 ?m to 5.6 ?m of copper. Deposition rates of up to 92 A/sec with an average coating rate of 30 A/sec were measured. Effects on RF resistivity is also to be measured.
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