Development oftheMaskless Exposure Device equipped withaLCD-Projector for Fabrication ofMicropatterned Surfaces andMicrofluidic Channels

A newlydeveloped deviceforphotolithography of micropatterns without thepreparation ofphotomasks by amodified, commercially available liquid crystal display projector (LCDP) was reported. Thenoveldevise was equipped withanXY positioning stage, sliding system forvariable focal distance, andexchangeable objective lens, facilitating theexposure ofmicropatterns with large areaandvariable resolution.