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Enhanced Strain Relaxation in AlGaN Layers Grown on Sputter‐Based AlN Templates
Enhanced Strain Relaxation in AlGaN Layers Grown on Sputter‐Based AlN Templates
2020
Yosuke Mogami
Atsushi Osawa
Kazuto Ozaki
Yukitake Tanioka
Atsushi Maeoka
Yuri Itokazu
Shunsuke Kuwaba
Masafumi Jo
Noritoshi Maeda
Hiroyuki Yaguchi
Hideki Hirayama
Keywords:
Sputtering
Condensed matter physics
Template
Annealing (metallurgy)
Strain (chemistry)
Physics
Correction
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