Abwasser in der Halbleiterfertigung. Adsorptive Mitfällung von Arsen und Antimon an Fe(OH)3

Adsorptive co-precipitation of arsenic and antimony on Fe(OH) 3 . The adsorptive co-precipitation of arsenic and antimony on Fe(OH) 3 from waste water of semiconductor production is affected by several components contained in the waste water. The residual concentration remaining in the filtrate after precipitation is essentially conditional on the Fe/Sb proportion and from the precipitation agent. Milk of lime used as such an agent yields the best results. In the presence of oxidizing agents, hydrofluoric acid will produce a disturbance of precipitation of antimony which cannot be eliminated