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Investigation of p-type Microcrystalline Silicon Sputtered Using Highly Boron Doped Silicon Sputtering Target
Investigation of p-type Microcrystalline Silicon Sputtered Using Highly Boron Doped Silicon Sputtering Target
2021
Yuta Shiratori
Shinsuke Miyajima
Keywords:
microcrystalline silicon
Materials science
Optoelectronics
Sputtering
Silicon
boron doping
Correction
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