Self-organized nanodot formation on InP(100) by oxygen ion sputtering

Abstract We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O 2 + beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38° and 44° incidence with ion current density of 100 μA cm −2 . At 56° and 62° incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In 2 O 3 and various InP oxides; and is In 2 O 3 -rich due to the preferential sputtering of P atoms.