Forming a substrate with wires for laminate substrate with wires and methods for their preparation

Using a silver-based material on the conductive layer, it a substrate with wires forming laminate was protected by coating with a conductive protective layer, the contact resistance is extremely low wiring between the cathode being stacked conductive protective layer and its the provision of per forming a substrate for the laminate. Has a substrate, a conductive layer containing silver or a silver alloy formed on the substrate, which is formed so as to cover the conductor layer on the conductive layer, and a conductive protective layer containing indium zinc oxide, a substrate with wires forming laminate, the conductive protective layer, a conductive protective layer formed by sputtering in an atmosphere content below 1.5% by volume of oxidizing gas in the sputtering gas, wire forming a substrate for laminate attached.