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Fabrication of UVC AlGaN LEDs on DC-sputter-based AlN templates
Fabrication of UVC AlGaN LEDs on DC-sputter-based AlN templates
2019
Yosuke Mogami
Atsushi Osawa
Kazuto Ozaki
Yukitake Tanioka
Atsushi Maeoka
Yuri Itokazu
Shunsuke Kuwaba
Jo Masafumi
Noritoshi Maeda
Hiroyuki Yaguchi
Hideki Hirayama
Keywords:
Annealing (metallurgy)
Sputtering
Template
Fabrication
Light-emitting diode
Optoelectronics
Materials science
Correction
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