Chip self-redistribution device and method thereof
2008
The present invention provides an apparatus and a method for self-chip redistribution. The apparatus of the present invention comprises a glass substrate on which a trench and a cavity formed by a layer of photoresist. Chips are taken from a sawed wafer and arranged on the glass substrate and moved by fluid flow to the front of an index bar. The glass substrate and the index bar vibrate with a low frequency, to fill chips in the chip cavities. The present invention further provides a method for chip self-redistribution, which comprises providing a self-redistribution tool, transferring redistributed chips on a board forming tool, forming a chip-plate and separating the chip plate from the plate forming tool.
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