Fast chip aging prediction by product-like VMIN drift characterization on test structures

We develop a novel product-like characterization methodology on test structures to predict chip aging property rapidly. To assure intrinsic reliability through a chip's lifetime, an aging voltage guardband is usually collected by high temperature operation lifetime test (HTOL) and implemented to voltage setting. In this work, we propose a method to mimic product-like characterization on test structures to evaluate minimum operating voltage (VMIN) shift. Then, the correlation was established and studied between test-structure measurements and chip-level VMIN shift analysis. Therefore, with this methodology, product aging guard-band can be assessed rapidly with process and use condition adjusting.