High‐dose phenomena in zinc‐implanted silicon crystals

The structure of (100) silicon implanted with Zn+ ions at an energy of 50 keV was studied. The ion doses were varied from 1×1015 to 1×1017 cm−2 and the beam current density was 10 μA cm−2. The analytical techniques employed for sample characterization included cross‐sectional transmission electron microscopy and x‐ray energy dispersion analysis. The energy deposition of the ion beam was calculated by using computer simulation codes. For the two lower doses of 1×1015 and 1×1016 a crystalline‐to‐amorphous transformation was observed in the implanted layer and this was correlated with the thermal history of the implants and the attendant changes in morphology. In contrast, an amorphous‐to‐crystalline transition was found to occur at higher doses, namely 5×1016 and 1×1017, where the formation of a complex, structured layer consisting of an amorphous phase mixed with crystalline grains of Zn and partly recrystallized Si was identified together with other specific structural features. Detailed characterization ...