Research of the dielectric properties of polyethyleneterephthalate modified by fluorocarbon films formed by ion-plasma technology methods

The paper presents the results of a study of polyethyleneterephthalate (PET), modified by nanostructured fluorocarbon films formed by vapor deposition in a vacuum using a two-component gas mixture containing a film coating component (C6H12) and an etching component (CF4). The dependence of the dielectric loss tangent and permittivity on the ratio of the components of the gas mixture is established. The obtained data were correlated with the physicochemical characteristics of the materials used.