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Evaluation of Multi-Level Thin Film Structures A Case Study
Evaluation of Multi-Level Thin Film Structures A Case Study
1995
Daniel J. Berger
John R. Pennacchia
Eric D. Perfecto
Hai P. Longworth
Ahmed M. Omar
Mary Cullinan-Scholl
Raj Patel
George White
Keywords:
Thin film
Layer by layer
Composite material
Materials science
Correction
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