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Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
2012
Raul E. Riveros
Hitomi Yamaguchi
Taylor Boggs
Ikuyuki Mitsuishi
Kazuhisa Mitsuda
Utako Takagi
Yuichiro Ezoe
Kensuke Ishizu
Teppei Moriyama
Keywords:
Metallurgy
Surface roughness
Engineering
X-ray optics
Crystal optics
Hydrogen
Annealing (metallurgy)
Analytical chemistry
Magnetic field
Microelectromechanical systems
Silicon
Optics
Microporous material
Optoelectronics
Correction
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