Precision Control of Third-order Profile Planning for High Accuracy Point-to-point Motion System

A third-order profile planning method and precision control strategies for point-to-point motion are studied. Several crite- rions are presented relying on all possible instances for third-order profile planning. Based on these criteria and dynamic constraints, fast and accurate algorithm of profile planning with time-optimality by preprocessing the entire profile as a whole is described. Ac- curacy losses in discrete time implementation are considered. As a result, an internal integer data integration strategy and a compen- sation approach based on correcting factor are investigated. Finally, experiment results demonstrate the effectiveness and reliability of the proposed methods. The presented method is successfully applied in semiconductor manufacturing equipments.