Effect of oxygen gas flow rate on phase transformation and morphology of vanadium oxide thin films

Abstract The vanadium oxide thin films were deposited on glass substrate using DC reactive magnetron sputtering method. The effect of O 2  flow rate on the phase transformation, microstructure and surface morphology of thin films was studied by X-ray diffractometer, Raman spectroscopy and Field emission scanning electron microscopy (FESEM), respectively. The obtained results indicated that the O 2 flow rate affected the lattice structure integrity significantly. In addition, the surface morphology of vanadium oxide thin films were depends strongly on the O 2 flow rates.