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Al2O3 as Surface Passivation Coating for c-Si Solar Cells by Large-Scale In-Line Sputtering
Al2O3 as Surface Passivation Coating for c-Si Solar Cells by Large-Scale In-Line Sputtering
2010
M. Hofmann
J. Catoir
Winfried Wolke
Roland Trassl
Sven Schramm
Manfred Englert
T. Dieter
Jian Liu
Keywords:
Silicon nitride
Sputtering
Composite material
Passivation
Coating
Materials science
Optoelectronics
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